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CIQTEK is the manufacturer and global supplier of high-performance scientific instruments, such as Electron Microscopes, Electron Paramagnetic Resonance (Electron Spin Resonance), Gas Adsorption Analyzers, quantum sensors, quantum computers, etc.
Ultra-high Resolution Field Emission Scanning Electron Microscope for sale
Ultra-high Resolution Field Emission Scanning Electron Microscope for sale

Ultra-high Resolution Field Emission Scanning Electron Microscope | SEM5000X

CIQTEK SEM5000X is an ultra-high resolution Field Emission Scanning Electron Microscope (FE-SEM) with breakthrough resolution of 0.6 nm@15 kV and 1.0 nm@1 kV.

Benefiting from the upgraded column engineering process, “SuperTunnel” technology, and high-resolution objective lens design, SEM5000X can achieve further improvements in low-voltage imaging resolution. The specimen chamber ports extend to a number of 16, and the specimen exchange load-lock supports up to 8-inch wafer size (maximum diameter 208 mm), greatly expanding applications' coverage. The advanced scanning modes and enhanced automated functions bring stronger performance and an even more optimized experience.

Key Parameters Resolution

0.6 nm @ 15 kV, SE

1.0 nm @ 1 kV, SE

Acceleration Voltage 20 V ~ 30 kV
Magnification 1 ~ 2,500,000 x
Electron Gun Type Schottky Field Emission Electron Gun
Specimen Chamber
Vacuum System
Fully Automated Control
Cameras Dual Cameras (optical navigation + chamber monitor)
Stage Type 5-Axis Mechanical Eucentric Specimen Stage
Stage Range

X=110 mm, Y=110 mm, Z=65 mm

T: -10*~+70°, R: 360°

Detectors and Extensions Standard

In-lens Detector

Everhart-Thornley Detector (ETD)

Optional

Retractable Back-Scattered Electron Detector(BSED)

Retractable Scanning Transmission Electron Microscopy Detector (STEM)

Energy Dispersive Spectrometer (EDS)

Electron Backscatter Diffraction Pattern (EBSD)

Specimen Exchange Loadlock (4" & 8" optional)

Trackball & Knob Control Panel

Specimen Stage Tandem Deceleration

Magnetic Field & Acoustic Noise Enclosure System(SEMI Certified)

Software Languages

English

Operating System

Windows

Navigation

Nav-Cam, Gesture Quick Navigation

Automatic Functions

Auto Brightness & Contrast, Auto Focus, Auto Stigmator

 

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