High-Speed
Scanning Driver

Dwell time 10 ns/pixel, maximum imaging acquisition speed 2*100M pixel/s
Signal Electron Filtering
System
SE/BSE signal-free switching, mixing with adjustable ratio
Fully Electrostatic
High-Speed Beam Deflection System
High-resolution large field imaging achievable maximum field of view up to 64um*64um at 4 nm per pixel

Sample Stage
Deceleration Technology
Reduce incident electron landing voltage, increasing signal electron capturing efficiency
Electromagnetic & Electrostatic Combo Immersion Objective Lens Beam Deflection System
Objective lens magnetic field immerses sample, contributes low-aberration high-resolution imaging

HEM6000-Semi	HEM6000-Bio	HEM6000-Lit
Low voltage & high resolution	Low voltage & high resolution	Simplified operation
Large field of view	Various automated algorithms for the biological field	Abundant selection options
Specially optimized algorithms for easy alignment of highly repetitive specimens	BSE Detector Optimized for biological applications	High-speed automated workflow
Five-stage electrostatic deflection	Biological 3D reconstruction system

High-speed Automation
Fully automatic sample loading & offloading process and image acquisition operation, which makes the overall imaging speed 5 times faster than that of conventional FESEM
Large Field of View
Technology that dynamically shifts the optical axis according to the scanning deflection range, achieves minimum edge distortion
Low Imaging Distortion
Specimen stage tandem deceleration technology, achieves low landing energy, whilst obtaining high-resolution images

IC Chip (Metal layer) / 116x / BSE / 120 ns
IC Chip (Device layer) / 2,000x / BSE / 40 ns
IC Chip (Metal layer) / 96x / BSE / 80 ns

IC Chip (Metal layer) / 1,000x / BSE / 40 ns
Biopsy Section / 9,500x / BSE / 120 ns
Biopsy Section / 10,000x / BSE / 120 ns

Biopsy Section / 10,000x / BSE / 120 ns
Biopsy Section / 116x / BSE / 120 ns
Glomerulus / 1,800x / BSE / 120ns

Testicular Section / 9,500x / BSE / 120ns
Renal Pathology Section / 40,000X / STEM / 320ns
Renal Pathology Section / 38,571x / STEM / 320ns

Renal Pathology Section / 9,324x / STEM / 320ns
Renal Pathology Section / 8,110x / STEM / 320ns
Macrophages / BSE / 3,500x / 320ns

Poly Layer
M1 Layer

Result	HEM6000	Conventional Field Emission SEM
Pixel Size (Single Frame)	8192 * 8192
Pixel Time	120 ns(dot/line/frame: average 6/2/1)	800 ns
Pixel Size	16 nm
Total Field Covered	2 mm²
Total Acquisition Time	25 minutes and 32 seconds.	> 140 minutes

CIQTEK High-speed SEM Microscope HEM6000

Inside CIQTEK Factory: Electron Microscope Manufacturing Tour

CIQTEK High-speed SEM Microscope HEM6000 Specifications		HEM6000-Semi	HEM6000-Bio	HEM6000-Lite
Electron Optics	Resolution	1.5 nm@1 kV SE	1.8 nm@1 kV BSE	1.5 nm@15 kV BSE
	Accelerating Voltage	0.1 kv~6 kV (Deceleration mode)	6 kV~30 kV (None-decel mode)	6 kV~30 kV
	Magnification	66~1,000,000x
	Electron Gun	High brightness Schottky field emission electron gun
	Type of Objective Lens	Immersion electromagnetic & electrostatic combo objective lens
	Electrostatic Deflector	Five-stage	Four-stage	Four-stage
Sample Loading System	Vacuum System	Fully automatic oil-free vacuum system
	Specimen Monitoring	Horizontal main chamber monitoring camera; vertical sample exchange loadlock chamber monitoring camera
	Maximum Sample Size	4 inches in diameter
	Specimen Stage Type	Motorized 3-axis specimen stage (*optional piezoelectric driven specimen stage)
	Specimen Stage Travel Rang	X, Y: 110 mm; Z: 16 mm
	Specimen Stage Repeatability	X：±0.6 μm；Y：±0.3 μm
	Specimen Exchange	Full automatic
	Sample Exchanging Duration	<15 minutes
	Loadlock Chamber Cleaning	Fully automatic plasma cleaning system
Image Acquisition and Processing	Dwell Time	10 ns/pixel
	Acquisition Speed	2*100 M pixel/s
	Image Size	16 K*16 K
Detector & Accessories	Low Angle Retractable Back-scattered Electron Detector	Optional	None	Standard
	Low Angle Back-scattered Electron Detector, Lower mounted	Optional	Standard	None
	In-column Overall Electron Detector	Standard	Optional	Optional
	In-column High-angle Backscattered Electron Detector	Optional	Optional	Optional
	Piezoelectric Driven Specimen Stage	Optional	Optional	Optional
	High Resolution Large FOV Mode (SW)	Optional	None	None
	Loadlock Chamber Plasma Cleaning System	Optional	Optional	Optional
	6-inch Specimen Loading System	Optional	Optional	Optional
	Active Anti-vibration Platform	Optional	Optional	Optional
	Al Noise Reduction; Large Area Field Stitching; 3D Reconstruction	Optional	Optional	Optional
User Interface	Language	English
	OS	Windows
	Navigation	Optical navigation, gesture navigation
	Automatic Function	Automatic sample recognition, automatic imaging area selection, automatic brightness & contrast, automatic focus, automatic stigmator

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